Inspection Equipment System For SiC (NOVA-2000) is designed for defect inspection of SiC substrate  wafers and homogeneous epitaxial wafers. It features a dedicated multi-channel optical inspection system and an automatic defect detection and classification algorithm tailored for the diversity of SiC defects.The equipment detects and categorizes defects such as micropipes, stacking faults, triangular defects, step bunching, and more, significantly enhancing SiC quality control and process optimization.

Note: We can provide customized instruments of the same type and related testing solutions according to customer requirements.